Background
Semiconductor manufacturing imposes strict requirements on cooling water purity and stability. Scaling, corrosion and microbial contamination all transmit to the process side through heat-transfer efficiency drift.
How it works
Targeting a narrow water quality window, ECD descaling, online monitoring and concentration ratio optimisation are combined to hold pH, conductivity, turbidity and corrosion rate simultaneously inside the process window.
Key capabilities
- Multi-parameter online monitoring with narrow-band closed-loop control
- Reduced chemical dosing lowers ionic ingress
- Heat-transfer surface cleanliness visible; approach trend traceable
- Data can be integrated with the fab FMCS
Questions and answers
What is the core value of Cooling Water for Semiconductor Fabs?
Water quality stability and micro-contamination control in service of process yield
What problem does it solve?
Semiconductor manufacturing imposes strict requirements on cooling water purity and stability. Scaling, corrosion and microbial contamination all transmit to the process side through heat-transfer efficiency drift.
How does it work?
Targeting a narrow water quality window, ECD descaling, online monitoring and concentration ratio optimisation are combined to hold pH, conductivity, turbidity and corrosion rate simultaneously inside the process window.